Nucleation and initial growth of sp2-BNon α-Al2O3 and SiC by chemical vapour deposition

Chubarov, Mikhail (author): Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska högskolan

Högberg, Hans (author): Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan

Andersson, Sven G. (author): Linköpings universitet,Halvledarmaterial,Tekniska högskolan

Henry, Anne (author): Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan

(creator_code:org_t)

Abstract Subject headings

Knowledge on thin films evolution from the early stages of growth is important for the control of quality and properties of the film. Here we present study of the early growth stages and evolution of the crystalline structure of sp2 hybridised Boron Nitride (BN) thin films deposited by chemical vapour deposition from triethyl boron and ammonia. Nucleation of hexagonal BN (h-BN) is observed already at 1200 °C on α-Al2O3 substrate with an AlN buffer layer (AlN/α-Al2O3) while no formation of h-BN is detected when the growth is done on 6H-SiC in a growth temperature range between 1200 °C and 1700 °C. We demonstrate that h-BN grows on AlN/α-Al2O3 exhibiting a layer-by-layer growth mode up to ca. 4 nm followed by a transition to r-BN growth when grown at 1500 °C. The following r-BN growth is suggested to proceed with mixed layer-by-layer and island growth mode; after a thin continuous layer of r-BN, islands formation is favoured leading to a twinned r-BN structure of the film. We find that h-BN does not grow on 6H-SiC substrates instead r-BN nucleates and grows directly as a twinned crystal. The twinning is found to be suppressed by a surface preparation of the SiC substrate with SiH4 prior to BN growth. These results open up for a more controlled epitaxial growth of sp2-BN for future electronic applications.

By the author/editor: Chubarov, Mikhai ...; Pedersen, Henrik; Högberg, Hans; Czigany, Zsolt; Andersson, Sven ...; Henry, Anne

About the subject

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