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Trimethylboron as s...
Trimethylboron as single-source precursor for boron-carbonthin film synthesis by plasma chemical vapor deposition
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- Imam, Mewlude (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,European Spallat Source ESS AB, Sweden
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- Höglund, Carina (author)
- Linköpings universitet,Tekniska fakulteten,Tunnfilmsfysik,European Spallation Source ERIC, Lund, Sweden
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- Jensen, Jens (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Schmidt, Susann (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,European Spallation Source ERIC, Lund, Sweden
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- Ivanov, Ivan Gueorguiev (author)
- Linköpings universitet,Halvledarmaterial,Tekniska fakulteten
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- Hall-Wilton, Richard (author)
- European Spallation Source ERIC, Lund, Sweden
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- Birch, Jens (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Pedersen, Henrik (author)
- Linköpings universitet,Kemi,Tekniska fakulteten
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(creator_code:org_t)
- 2015
- English.
- Related links:
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https://urn.kb.se/re...
Abstract
Subject headings
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- Boron-carbon (BxC) thin films are potential neutron converting layers for 10B-based neutron detectors. However, as common material choices for such detectors do not tolerate temperature above 500°C, a low temperature deposition route is required for this application. Here we study trimethylboron B(CH3)3 (TMB) as a single-source precursor for the deposition of BxC thin films by plasma CVD using Ar plasma. The effect of plasma power, TMB/Ar ratio and total pressure on the film composition, morphology and structure are investigated. The highest B/C ratio of 1.9 was achieved at high TMB flow in a low total pressure and high plasma power which rendered an approximate substrate temperature of ~ 300 °C. X-ray photoelectron spectroscopy shows that B-C bonds prevail in the films, although C-C and B-O bonds are also present. Raman spectroscopy confirms the presence of amorphous carbon phases in the films. The H content in the films is found to be 15±5 at. % by the time of flight elastic recoil detection analysis (Tof-ERDA). The film density as determined from X-ray reflectivity (XRR) measurements is 2. 16 ± 0.01 g/cm3 and the internal compressive stresses are measured to be less than 400 MPa.
Subject headings
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
- NATURVETENSKAP -- Kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences (hsv//eng)
Publication and Content Type
- vet (subject category)
- ovr (subject category)
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