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Early stages of gro...
Early stages of growth and crystal structure evolution of boron nitride thin films
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- Henry, Anne (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Chubarov, Mikhail (author)
- Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska fakulteten,Grenoble INP, France
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- Czigany, Zsolt (author)
- Hungarian Academic Science, Hungary
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- Garbrecht, Magnus (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Högberg, Hans (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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(creator_code:org_t)
- IOP PUBLISHING LTD, 2016
- 2016
- English.
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In: Japanese Journal of Applied Physics. - : IOP PUBLISHING LTD. - 0021-4922 .- 1347-4065. ; 55:5, s. 05FD06-
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.7...
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Abstract
Subject headings
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- A study of the nucleation and crystal structure evolution at the early stages of the growth of sp(2)-BN thin films on 6H-SiC and alpha-Al2O3 substrates is presented. The growth is performed at low pressure and high temperature in a hot wall CVD reactor, using ammonia and triethylboron as precursors, and H-2 as carrier gas. From high-resolution transmission electron microscopy and X-ray thin film diffraction measurements we observe that polytype pure rhombohedral BN (r-BN) is obtained on 6H-SiC substrates. On alpha-Al2O3 an AlN buffer obtained by nitridation is needed to promote the growth of hexagonal BN (h-BN) to a thickness of around 4 nm followed by a transition to r-BN growth. In addition, when r-BN is obtained, triangular features show up in plan-view scanning electron microscopy which are not seen on thin h-BN layers. The formation of BN after already one minute of growth is confirmed by X-ray photoelectron spectroscopy. (C) 2016 The Japan Society of Applied Physics
Subject headings
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Publication and Content Type
- ref (subject category)
- art (subject category)
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