Computer screen photo-assisted off-null ellipsometry

Bakker, Jimmy W.P. (author): Linköpings universitet,Tillämpad optik,Tekniska högskolan

Arwin, Hans (author): Linköpings universitet,Tillämpad optik,Tekniska högskolan

Lundström, Ingemar (author): Linköpings universitet,Tillämpad Fysik,Tekniska högskolan

Filippini, Daniel (author): Linköpings universitet,Tillämpad Fysik,Tekniska högskolan

(creator_code:org_t)

Related links:: http://urn.kb.se/res...; show more...; https://urn.kb.se/re...; https://doi.org/10.1...; show less...

Abstract Subject headings

The ellipsometric measurement of thickness is demonstrated using a computer screen as a light source and a webcam as a detector, adding imaging off-null ellipsometry to the range of available computer screen photoassisted techniques. The results show good qualitative agreement with a simplified theoretical model and a thickness resolution in the nanometer range is achieved. The presented model can be used to optimize the setup for sensitivity. Since the computer screen serves as a homogeneous large area illumination source, which can be tuned to different intensities for different parts of the sample, a large sensitivity range can be obtained without sacrificing thickness resolution.

By the author/editor: Bakker, Jimmy W. ...; Arwin, Hans; Lundström, Ingem ...; Filippini, Danie ...

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