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Computer screen pho...
Computer screen photo-assisted off-null ellipsometry
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- Bakker, Jimmy W.P. (author)
- Linköpings universitet,Tillämpad optik,Tekniska högskolan
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- Arwin, Hans (author)
- Linköpings universitet,Tillämpad optik,Tekniska högskolan
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- Lundström, Ingemar (author)
- Linköpings universitet,Tillämpad Fysik,Tekniska högskolan
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- Filippini, Daniel (author)
- Linköpings universitet,Tillämpad Fysik,Tekniska högskolan
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(creator_code:org_t)
- 2006
- 2006
- English.
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In: Applied Optics. - 1559-128X .- 2155-3165. ; 45:30, s. 7795-7799
- Related links:
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http://urn.kb.se/res...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- The ellipsometric measurement of thickness is demonstrated using a computer screen as a light source and a webcam as a detector, adding imaging off-null ellipsometry to the range of available computer screen photoassisted techniques. The results show good qualitative agreement with a simplified theoretical model and a thickness resolution in the nanometer range is achieved. The presented model can be used to optimize the setup for sensitivity. Since the computer screen serves as a homogeneous large area illumination source, which can be tuned to different intensities for different parts of the sample, a large sensitivity range can be obtained without sacrificing thickness resolution.
Keyword
- TECHNOLOGY
- TEKNIKVETENSKAP
Publication and Content Type
- ref (subject category)
- art (subject category)
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