onr:"swepub:oai:DiVA.org:liu-13976"
Search: onr:"swepub:oai:DiVA.org:liu-13976" > Spatial electron de...
- 1 of 1
- Previous record
- Next record
- To hitlist
- Böhlmark, JohanLinköpings universitet,Plasma och ytbeläggningsfysik,Tekniska högskolan (author)
Spatial electron density distribution in a high-power pulsed magnetron discharge
- Article/chapterEnglish2005
Publisher, publication year, extent ...
- 2005
- printrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:liu-13976
- https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-13976URI
- https://doi.org/10.1109/TPS.2005.845022DOI
Supplementary language notes
- Language:English
- Summary in:English
Part of subdatabase
- SwePubSwePub
Classification
Notes
- The spatial electron density distribution was measured as function of time in a high-power pulsed magnetron discharge. A Langmuir probe was positioned in various positions below the target and the electron density was mapped out. We recorded peak electron densities exceeding 1019 m-3 in a close vicinity of the target. The dynamics of the discharge showed a dense plasma expanding from the "race-track" axially into the vacuum chamber. We also record electrons trapped in a magnetic bottle where the magnetron magnetic field is zero, formed due to the unbalanced magnetron.
Subject headings and genre
- magnetron sputtering
- plasma density
- pulsed plasmas
- thin film deposition
- NATURAL SCIENCES
- NATURVETENSKAP
Added entries (persons, corporate bodies, meetings, titles ...)
- Gudmundsson, J. T. (author)
- Alami, JonesLinköpings universitet,Plasma och ytbeläggningsfysik,Tekniska högskolan(Swepub:liu)jonal90 (author)
- Lattemann, MartinaLinköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska högskolan(Swepub:liu)marla08 (author)
- Helmersson, UlfLinköpings universitet,Plasma och ytbeläggningsfysik,Tekniska högskolan(Swepub:liu)ulfhe30 (author)
- Linköpings universitetPlasma och ytbeläggningsfysik (creator_code:org_t)
Related titles
- In:IEEE Transactions on Plasma Science33:2, s. 346-3470093-38131939-9375
Internet link
Find in a library
- IEEE Transactions on Plasma Science (Search for host publication in LIBRIS)
To the university's database
- 1 of 1
- Previous record
- Next record
- To hitlist
Find more in SwePub
- By the author/editor
- Böhlmark, Johan
- Gudmundsson, J. ...
- Alami, Jones
- Lattemann, Marti ...
- Helmersson, Ulf
- Articles in the publication
- IEEE Transaction ...
- By the university
- Linköping University
Search outside SwePub
- Extend your search to:
- Google Book Search
- Google Scholar
Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.
- Copyright © LIBRIS - National Library Systems
- LIBRIS.kb.se
