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Magnetron Sputter E...
Magnetron Sputter Epitaxy of High-Quality GaN Nanorods on Functional and Cost-Effective Templates/Substrates
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- Serban, Alexandra, 1988- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Palisaitis, Justinas, 1983- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Junaid, Muhammad, 1975- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Tengdelius, Lina, 1986- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Högberg, Hans, 1968- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Hultman, Lars, Professor, 1960- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Persson, Per Ola Åke, 1971- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Birch, Jens, 1960- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Hsiao, Ching-Lien, 1975- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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(creator_code:org_t)
- 2017-09-02
- 2017
- English.
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In: Energies. - Basel, Switzerland : MDPI AG. - 1996-1073. ; 10:9
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https://liu.diva-por... (primary) (Raw object)
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Abstract
Subject headings
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- We demonstrate the versatility of magnetron sputter epitaxy by achieving high-quality GaN nanorods on different substrate/template combinations, specifically Si, SiC, TiN/Si, ZrB2/Si, ZrB2/SiC, Mo, and Ti. Growth temperature was optimized on Si, TiN/Si, and ZrB2/Si, resulting in increased nanorod aspect ratio with temperature. All nanorods exhibit high purity and quality, proved by the strong bandedge emission recorded with cathodoluminescence spectroscopy at room temperature as well as transmission electron microscopy. These substrates/templates are affordable compared to many conventional substrates, and the direct deposition onto them eliminates cumbersome post-processing steps in device fabrication. Thus, magnetron sputter epitaxy offers an attractive alternative for simple and affordable fabrication in optoelectronic device technology.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- GaN
- nanorods
- Si
- SiC
- Ti
- Mo
- TiN and ZrB2 templates
- magnetron sputtering
- epitaxy
Publication and Content Type
- ref (subject category)
- art (subject category)
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Energies
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- By the author/editor
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Serban, Alexandr ...
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Palisaitis, Just ...
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Junaid, Muhammad ...
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Tengdelius, Lina ...
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Högberg, Hans, 1 ...
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Hultman, Lars, P ...
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Persson, Per Ola ...
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Birch, Jens, 196 ...
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Hsiao, Ching-Lie ...
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- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
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and Condensed Matter ...
- Articles in the publication
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Energies
- By the university
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Linköping University