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Structural, electri...
Structural, electrical, and mechanical properties of nc-TiC/a-SiC nanocomposite thin films
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- Eklund, Per (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Emmerlich, Jens (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Högberg, Hans (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Wilhelmsson, Ola (author)
- Uppsala universitet,Institutionen för materialkemi,Oorganisk kemi,oorganisk kemi,Department of Materials Chemistry, The Ångström Laboratory, Uppsala University, Sweden
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- Isberg, Peter (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Birch, Jens (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Persson, Per O. Å. (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Jansson, Ulf (author)
- Uppsala universitet,Institutionen för materialkemi,Oorganisk kemi,oorganisk kemi,Department of Materials Chemistry, The Ångström Laboratory, Uppsala University, Sweden
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- Hultman, Lars (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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(creator_code:org_t)
- American Vacuum Society, 2005
- 2005
- English.
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In: Journal of Vacuum Science & Technology B. - : American Vacuum Society. - 1071-1023 .- 1520-8567. ; 23:6, s. 2486-2495
- Related links:
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http://urn.kb.se/res...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- We have synthesized Ti–Si–C nanocomposite thin films by dc magnetron sputtering from a Ti3SiC2 compound target in an Ar discharge on Si(100), Al2O3(0001), and Al substrates at temperatures from room temperature to 300 °C. Electron microscopy, x-ray diffraction, and x-ray photoelectron spectroscopy showed that the films consisted of nanocrystalline (nc-) TiC and amorphous (a-) SiC, with the possible presence of a small amount of noncarbidic C. The growth mode was columnar, yielding a nodular film-surface morphology. Mechanically, the films exhibited a remarkable ductile behavior. Their nanoindentation hardness and E-modulus values were 20 and 290 GPa, respectively. The electrical resistivity was 330 µ cm for optimal Ar pressure (4 mTorr) and substrate temperature (300 °C). The resulting nc-TiC/a-SiC films performed well as electrical contact material. These films' electrical-contact resistance against Ag was remarkably low, 6 µ at a contact force of 800 N compared to 3.2 µ for Ag against Ag. The chemical stability of the nc-TiC/a-SiC films was excellent, as shown by a Battelle flowing mixed corrosive-gas test, with no N, Cl, or S contaminants entering the bulk of the films.
Subject headings
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
Keyword
- titanium compounds
- silicon compounds
- wide band gap semiconductors
- nanocomposites
- amorphous semiconductors
- thin films
- sputter deposition
- electron microscopy
- X-ray diffraction
- X-ray photoelectron spectra
- surface morphology
- ductility
- indentation
- hardness
- electrical resistivity
- electrical contacts
- contact resistance
- TECHNOLOGY
- TEKNIKVETENSKAP
- Inorganic chemistry
Publication and Content Type
- ref (subject category)
- art (subject category)
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