Synthesis and characterization of CrB 2 thin films grown by DC magnetron sputtering

• CrB x thin films with 1.90 < x < 2.08 have been deposited by direct-current magnetron sputtering (DCMS) from a stoichiometric CrB 2 target at 5 and 20 mTorr (0.67 and 2.67 Pa) Ar pressure onto sapphire (0 0 01) substrates. All films, irrespective of deposition conditions, exhibit a (0 0 01) texture. Attesting to the achievement of close-to-stoichiometric composition, epitaxial film growth is observed at 900 ?C, while film growth at 500 ?C yields (0001) fiber texture. Film composition does not depend on substrate temperature but exhibits slightly reduced B content with increasing pressure for samples deposited at 900 ?C. Excess B in the overstoichiometric epitaxial CrB 2.08 films segregates to form B-rich inclusions. Understoichiometry in CrB 1.90 films is accommodated by Cr-rich stacking faults on { 1 1? 00 } prismatic planes. ? 2021 The Author(s). Published by Elsevier Ltd on behalf of Acta Materialia Inc. This is an open access article under the CC BY license ( http://creativecommons.org/licenses/by/4.0/ )

Subject headings

NATURVETENSKAP  -- Fysik -- Den kondenserade materiens fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Condensed Matter Physics (hsv//eng)

Keyword

Chromium; Borides; PVD; Epitaxy; Lattice defects

Publication and Content Type

ref (subject category)

art (subject category)