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Enhanced quality of...
Enhanced quality of single crystal CrBx/TiBy diboride superlattices by controlling boron stoichiometry during sputter deposition
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- Dorri, Samira, 1988- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Linköping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 Linköping, Sweden.
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- Ghafoor, Naureen, 1975- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Linköping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 Linköping, Sweden.
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- Palisaitis, Justinas, 1983- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Linköping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 Linköping, Sweden.
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- Stendahl, Sjoerd (author)
- Uppsala universitet,Materialfysik
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- Devishvili, Anton (author)
- Institut Laue-Langevin, Grenoble, France,Inst Laue Langevin ILL, 71 Ave Martyrs CS 20156, Grenoble, France.
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- Vorobiev, Alexei (author)
- Uppsala universitet,Materialfysik,Inst Laue Langevin ILL, 71 Ave Martyrs CS 20156, Grenoble, France.
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- Eriksson, Fredrik, 1975- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Linköping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 Linköping, Sweden.
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- Persson, Per O.Å. 1971- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Linköping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 Linköping, Sweden.
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- Birch, Jens, Professor, 1960- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Linköping Univ, Dept Phys Chem & Biol IFM, Thin Film Phys Div, SE-58183 Linköping, Sweden.
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- Elsevier, 2024
- 2024
- English.
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In: Applied Surface Science. - : Elsevier. - 0169-4332 .- 1873-5584.
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- Single-crystal CrB2/TiB2 diboride superlattices with well-defined layers are promising candidates for neutron optics. However, excess B in sputter-deposited TiBy using a single TiB2 target deteriorates the structural quality of CrBx/TiBy (0001) superlattices. We study the influence of co-sputtering of TiB2 + Ti on the stoichiometry and crystalline quality of 300-nm-thick TiBy single layers and CrBx/TiBy (0001) superlattices on Al2O3(0001) substrates grown by DC magnetron sputter epitaxy at growth-temperatures TS ranging from 600 to 900 °C. By controlling the relative applied powers to the TiB2 and Ti magnetrons, y could be reduced from 3.3 to 0.9. TiB2.3 grown at 750 °C exhibited epitaxial domains about 10x larger than non-co-sputtered films. Close-to-stoichiometry CrB1.7/TiB2.3 superlattices with modulation periods Λ = 6 nm grown at 750 °C showed the highest single crystal quality and best layer definition. TiB2.3 layers display rough top interfaces indicating kinetically limited growth while CrB1.7 forms flat and abrupt top interfaces indicating epitaxial growth with high adatom mobility.
Subject headings
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- Superlattice
- Diboride
- Thin film
- Co-sputtering
- Nanostructure
Publication and Content Type
- ref (subject category)
- art (subject category)
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- By the author/editor
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Dorri, Samira, 1 ...
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Ghafoor, Naureen ...
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Palisaitis, Just ...
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Stendahl, Sjoerd
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Devishvili, Anto ...
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Vorobiev, Alexei
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Eriksson, Fredri ...
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Persson, Per O.Å ...
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Birch, Jens, Pro ...
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- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Physical Science ...
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and Condensed Matter ...
- Articles in the publication
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Applied Surface ...
- By the university
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Linköping University
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Uppsala University