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Epitaxial Ti2GeC, T...
Epitaxial Ti2GeC, Ti3GeC2, and Ti4GeC3 MAX-phase thin films grown by magnetron sputtering
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- Högberg, Hans, 1968- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Eklund, Per, 1977- (author)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
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- Emmerlich, Jens, 1974- (author)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
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- Birch, Jens, 1960- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Hultman, Lars, 1960- (author)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
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(creator_code:org_t)
- 2005
- 2005
- English.
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In: Journal of Materials Research. - 0884-2914 .- 2044-5326. ; 20:4, s. 779-782
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
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- We have grown single-crystal thin films of Ti2GeC and Ti3GeC2 and a new phase Ti4GeC3, as well as two new intergrown MAX-structures, Ti5Ge2C3 and Ti7Ge2C5. Epitaxial films were grown on Al2O3(0001) substrates at 1000 °C using direct current magnetron sputtering. X-ray diffraction shows that Ti–Ge–C MAX-phases require higher deposition temperatures in a narrower window than their Ti–Si–C correspondences do, while there are similarities in phase distribution. Nanoindentation reveals a Young’s modulus of 300 GPa, lower than that of Ti3SiC2. Four-point probe measurements yield resistivity values of 50–200 μΩcm. The lowest value is obtained for phase-pure Ti3GeC2(0001) films.
Keyword
- NATURAL SCIENCES
- NATURVETENSKAP
Publication and Content Type
- ref (subject category)
- art (subject category)
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Högberg, Hans, 1 ...
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Eklund, Per, 197 ...
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Emmerlich, Jens, ...
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Birch, Jens, 196 ...
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Hultman, Lars, 1 ...
- Articles in the publication
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Journal of Mater ...
- By the university
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Linköping University