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Synthesis of carbon...
Synthesis of carbon nitride thin films by low-energy ion beam assisted evaporation : On the mechanisms for fullerene-like microstructure formation
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- Gago, R. (author)
- Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden
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- Neidhardt, Jörg, 1976- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Vinnichenko, M. (author)
- Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden
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- Kreissig, U. (author)
- Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden
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- Czigany, Zsolt (author)
- Hungarian Academy of Sciences, Budapest,
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- Kolitsch, A. (author)
- Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden
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- Hultman, Lars, 1960- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Möller, W. (author)
- Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden
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(creator_code:org_t)
- Elsevier BV, 2005
- 2005
- English.
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In: Thin Solid Films. - : Elsevier BV. - 0040-6090 .- 1879-2731. ; 483:1-2, s. 89-94
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
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- Carbon nitride (CNx) thin films were grown at different substrate temperatures by low-energy (<100 eV) ion beam assistance deposition (LE-IBAD) in order to discern possible formation mechanisms of a fullerene-like (FL) microstructure. The samples are compared to those of well-structured FL-CNx films synthesized by reactive magnetron sputtering (MS). The comparison yields similar trends for both techniques, such as limitation of the nitrogen content at 20–25 at.%, dominance of sp2 hybrids, as well as thermally activated chemical desorption of CxNy species from the substrate during growth. However, CNx films produced by LE-IBAD are amorphous. The lack of FL structural features correlates with a lower degree of sp2 clustering, attributed to the promotion of nitrile groups. Therefore, low-energy ion bombardment is shown not to be a sufficient condition for the growth of FL-CNx. This result reinforces the eventual relevance of pre-formed CxNy species at the sputtering target in MS for the introduction and/or evolution of FL arrangements.
Keyword
- NATURAL SCIENCES
- NATURVETENSKAP
Publication and Content Type
- ref (subject category)
- art (subject category)
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- By the author/editor
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Gago, R.
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Neidhardt, Jörg, ...
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Vinnichenko, M.
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Kreissig, U.
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Czigany, Zsolt
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Kolitsch, A.
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Hultman, Lars, 1 ...
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Möller, W.
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- Articles in the publication
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Thin Solid Films
- By the university
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Linköping University