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RuO2 and Ru nanoparticles for MISiCFET gas sensors
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- Salomonsson, Anette, 1968- (author)
- Linköpings universitet,Tekniska högskolan,Tillämpad Fysik
- Roy, S (author)
- Aulin, C (author)
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- Strand, M (author)
- Sanati, M (author)
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- (creator_code:org_t)
- 2005
- 2005
- English.
- In: Nanotech NSTI 2005,2005. ; , s. 269-
- Conference paper (peer-reviewed)
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- NATURAL SCIENCES
- NATURVETENSKAP
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- kon (subject category)
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