onr:"swepub:oai:DiVA.org:liu-45721"
Search: onr:"swepub:oai:DiVA.org:liu-45721" > In-situ stress mea...
- 1 of 1
- Previous record
- Next record
- To hitlist
- Brunell, I.F. (author)
In-situ stress measurement during the deposition of CN x thin films by unbalanced magnetron sputtering; formation of high levels of stress with 28 eV ion irradiation
- Article/chapterEnglish2004
Publisher, publication year, extent ...
- Informa UK Limited,2004
- printrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:liu-45721
- https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-45721URI
- https://doi.org/10.1080/09500830410001716140DOI
Supplementary language notes
- Language:English
- Summary in:English
Part of subdatabase
- SwePubSwePub
Classification
Notes
- Stress development during growth of CN x films by unbalanced magnetron sputtering has been investigated with an in-situ laser deflection technique. The stress is initially tensile, then it becomes compressive, reaching a maximum of as much as 7 GPa. These are anomalously high stress levels compared with pure carbon, considering the low ion energies (28 eV) and ion-to-neutral arrival rate ratio (<1) employed. This phenomenon is explained by the formation of a fullerene-like microstructure and nitrogen substitution at the growth surface. An accompanying increased reactivity of carbon atoms promotes sp3 bonding or other cross-linking of curved basal planes with resulting film densification.
Subject headings and genre
- TECHNOLOGY
- TEKNIKVETENSKAP
Added entries (persons, corporate bodies, meetings, titles ...)
- Pichon, L.Lab. de Mëtallurgie Physique, UMR 6630-CNRS, Téléport 2, Boulevard Pierre et Marie Curie, Chasseneuil Cédex, France (author)
- Hellgren, N.Materials Research Laboratory, University of Illinois, 104 S. Goodwin Ave., Urbana, IL 61801, United States (author)
- Czigany, ZsoltLinköpings universitet,Tunnfilmsfysik,Tekniska högskolan(Swepub:liu)zsocz82 (author)
- Neidhardt, JörgLinköpings universitet,Tunnfilmsfysik,Tekniska högskolan(Swepub:liu)jorne78 (author)
- Hultman, LarsLinköpings universitet,Tunnfilmsfysik,Tekniska högskolan(Swepub:liu)larhu75 (author)
- Lab. de Mëtallurgie Physique, UMR 6630-CNRS, Téléport 2, Boulevard Pierre et Marie Curie, Chasseneuil Cédex, FranceMaterials Research Laboratory, University of Illinois, 104 S. Goodwin Ave., Urbana, IL 61801, United States (creator_code:org_t)
Related titles
- In:Philosophical Magazine Letters: Informa UK Limited84:6, s. 395-4030950-08391362-3036
Internet link
Find in a library
- Philosophical Magazine Letters (Search for host publication in LIBRIS)
To the university's database
- 1 of 1
- Previous record
- Next record
- To hitlist
Find more in SwePub
- By the author/editor
- Brunell, I.F.
- Pichon, L.
- Hellgren, N.
- Czigany, Zsolt
- Neidhardt, Jörg
- Hultman, Lars
- Articles in the publication
- Philosophical Ma ...
- By the university
- Linköping University
Search outside SwePub
- Extend your search to:
- Google Book Search
- Google Scholar
Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.
- Copyright © LIBRIS - National Library Systems
- LIBRIS.kb.se
