Structural, electrical, and optical properties of diamondlike carbon films deposited by dc magnetron sputtering

Letters
The electrical and optical properties of diamondlike carbon films deposited by direct current magnetron sputtering on Si substrates at room temperature have been measured as a function of the ion energy (Eion) and ion-to-carbon flux (Jion/JC). The results show that, in the ranges of 5 eV⩽Eion⩽85 eV and 1.1⩽Jion/JC⩽6.8, the presence of defective graphite formed by subplanted C and Ar atoms, voids, and the surface roughness, are the dominant influences on the resistivity and optical absorption

Lindquist, O.P.A.Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska högskolan (author)
Hellgren, N.University of Illinois, Urbana (author)
Hultman, LarsLinköpings universitet,Tunnfilmsfysik,Tekniska högskolan(Swepub:liu)larhu75 (author)
Holloway, B.C.College of William and Mary, Williamsburg, Virginia (author)
College of William and Mary, Williamsburg, VirginiaInstitutionen för fysik, kemi och biologi (creator_code:org_t)

In:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films: American Vacuum Society0734-21011520-8559

By the author/editor: Broitman, E.; Lindquist, O.P.A ...; Hellgren, N.; Hultman, Lars; Holloway, B.C.

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