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Chemical bonding in carbon nitride films studied by X-ray spectroscopies
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- Zheng, W.T. (author)
- Department of Materials Science and National Key Laboratory of Superhard Materials, Jilin University, Changchun 130023, China, Department of Precision Engineering, Chiba Institute of Technology, 2-17-1 Tsudanuma, Narashino 275-0016, Japan, Department of Physics, Linkoping University, S-581 83 Linkoping, Sweden, National Key Laboratory of Materials Surface Modification by Laser, Ion, and Electron, Dalian University of Technology, Dalian 116024, China
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- Guo, J.H. (author)
- Department of Physics, Uppsala University, Box 530, 751 21 Uppsala, Sweden
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- Sakamoto, Y. (author)
- Department of Precision Engineering, Chiba Institute of Technology, 2-17-1 Tsudanuma, Narashino 275-0016, Japan
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- 2001
- 2001
- English.
- In: Diamond and related materials. - 0925-9635 .- 1879-0062. ; 10:9-10, s. 1897-1900
- Journal article (peer-reviewed)
Abstract
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- Carbon nitride films are deposited using dc magnetron sputtering in a N2 discharge. The nature of chemical bonding of the films is investigated using X-ray photoelectron spectroscopy, near-edge X-ray absorption fine structure, and X-ray emission spectroscopy. X-Ray photoelectron spectroscopy spectra show that N1s binding states depend on substrate temperature, in which two pronounced peaks can be observed. The near edge X-ray absorption fine structure at C1s and N1s exhibits a similar absorption profile in the p* resonance region, but the s* resonance is sharper in the N1s spectra. Resonant N K-emission spectra show a strong dependence on excitation photo energies. Compared XPS N1s spectra with recent theoretical calculations by Johansson and Stafstrom, two main nitrogen sites are assigned in which N bound to sp3 hybridized C and sp2 hybridized C, respectively. The correlation of X-ray photoelectron, X-ray absorption, and X-ray emission spectra for N in carbon nitride films is also discussed. © 2001 Elsevier Science B.V. All rights reserved.
Keyword
- Carbon nitride film
- Chemical bonding
- Magnetron sputtering
- X-ray spectroscopies
- NATURAL SCIENCES
- NATURVETENSKAP
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- art (subject category)
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- Zheng, W.T.
- Guo, J.H.
- Sakamoto, Y.
- Takaya, M.
- Li, X.T.
- Chao, P.J.
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- Jin, Z.S.
- Xing, K.Z.
- Sundgren, J.-E.
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