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Development of a ChemFET sensor with molecular films of porphyrins as sensitive layer

Andersson, Mike (author)
Linköpings universitet,Tekniska högskolan,Tillämpad Fysik
Holmberg, Martin (author)
Linköpings universitet,Tekniska högskolan,Institutionen för fysik, kemi och biologi
Lundström, Ingemar (author)
Linköpings universitet,Tekniska högskolan,Tillämpad Fysik
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Lloyd-Spets, Anita (author)
Linköpings universitet,Tekniska högskolan,Tillämpad Fysik
Martensson, P. (author)
Paolesse, R. (author)
Department of Chemical Science and Technology, University of Rome (Tor Vergata), via della Ricerca Scientifica, 00133 Rome, Italy
Falconi, C. (author)
Department of Electronic Engineering, University of Rome (Tor Vergata), Via di Tor Vergata 110, 00133 Rome, Italy
Proietti, E. (author)
Department of Electronic Engineering, University of Rome (Tor Vergata), Via di Tor Vergata 110, 00133 Rome, Italy
Di, Natale C. (author)
Di Natale, C., Department of Electronic Engineering, University of Rome (Tor Vergata), Via di Tor Vergata 110, 00133 Rome, Italy
D'Amico, A. (author)
Department of Electronic Engineering, University of Rome (Tor Vergata), Via di Tor Vergata 110, 00133 Rome, Italy
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 (creator_code:org_t)
2001
2001
English.
In: Sensors and actuators. B, Chemical. - 0925-4005 .- 1873-3077. ; 77:1-2, s. 567-571
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https://urn.kb.se/re...
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https://doi.org/10.1...
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  • Journal article (peer-reviewed)
Abstract Subject headings
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  • The interaction of chemical species with molecular films of porphyrins causes variations of the work function of the film itself, as it has been recently demonstrated by using the Kelvin probe technique. This characteristic makes porphyrins films suitable to be used as sensitive layers in ChemFET sensors. In this paper, we present a preliminary report about the fabrication and testing of such gas sensitive devices. The technological solutions towards an optimised device are also illustrated and discussed. © 2001 Elsevier Science B.V.

Keyword

ChemFET sensor
Palladium gate
Porphyrins films
TECHNOLOGY
TEKNIKVETENSKAP

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ref (subject category)
art (subject category)

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