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3-d thermal and flo...
3-d thermal and flow modeling of hot wall epitaxial chemical vapor deposition reactors, heated by induction
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- Lofgren, PM (author)
- ABB Corp Res, SE-72178 Vasteras, Sweden Royal Inst Technol, Faxen Lab, SE-10044 Stockholm, Sweden Linkoping Univ, IFM, SE-58183 Linkoping, Sweden
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- Hallin, Christer (author)
- Linköpings universitet,Tekniska högskolan,Institutionen för fysik, kemi och biologi
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- Gu, CY (author)
- ABB Corp Res, SE-72178 Vasteras, Sweden Royal Inst Technol, Faxen Lab, SE-10044 Stockholm, Sweden Linkoping Univ, IFM, SE-58183 Linkoping, Sweden
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- Ji, W (author)
- ABB Corp Res, SE-72178 Vasteras, Sweden Royal Inst Technol, Faxen Lab, SE-10044 Stockholm, Sweden Linkoping Univ, IFM, SE-58183 Linkoping, Sweden
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(creator_code:org_t)
- 2000
- 2000
- English.
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In: Materials Science Forum. - 0255-5476 .- 1662-9752. ; 338-3, s. 153-156
- Related links:
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https://urn.kb.se/re...
Abstract
Subject headings
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- A three dimensional computational model for temperature and flow predictions in hot wall chemical vapor deposition (CVD) reactors, heated by induction, is presented. It includes heating by a Radio Frequency (RF) coil, flow and heat transfer. Thermal radiation is modeled by a modified Monte Carlo method. Model predictions are compared to full scale experiments at Linkoping CVD reactor for epitaxial growth of silicon carbide (SIC). Both streamwise and spanwise temperature gradients are well predicted, with the temperature maximum location shifted slightly upstream compared to the measured. Additionally, the model succeeds in predicting a recirculation zone just downstream of the susceptor. It is demonstrated how thermal gradients can be greatly reduced by simple geometrical changes.
Keyword
- CVD
- epitaxial growth
- hot-wall
- numerical simulation
- TECHNOLOGY
- TEKNIKVETENSKAP
Publication and Content Type
- ref (subject category)
- art (subject category)
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