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Deviations from Veg...
Deviations from Vegard's rule in Al1-xInxN (0001) alloy thin films grown by magnetron sputter epitaxy
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Seppanen, T. (author)
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- Hultman, Lars (author)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
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- Birch, Jens (author)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
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- Beckers, M. (author)
- Institute for Ion Beam Physics and Materials Science (FWI), Forschungszentrum Rossendorf e.V. (FZR), P.O. Box 510119, 01314 Dresden, Germany
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- Kreissig, U. (author)
- Institute for Ion Beam Physics and Materials Science (FWI), Forschungszentrum Rossendorf e.V. (FZR), P.O. Box 510119, 01314 Dresden, Germany
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(creator_code:org_t)
- AIP Publishing, 2007
- 2007
- English.
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In: Journal of Applied Physics. - : AIP Publishing. - 0021-8979 .- 1089-7550. ; 101:4
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- Al1-xInxN (0001) thin films of the pseudobinary AlN-InN system were grown epitaxially onto (111)-oriented MgO wafers with seed layers of Ti1-y Zry N by dual direct current magnetron sputtering under ultrahigh vacuum conditions. The relaxed film c -axis lattice parameters determined by x-ray diffraction were studied as a function of composition in the range of 0.07
Keyword
- TECHNOLOGY
- TEKNIKVETENSKAP
Publication and Content Type
- ref (subject category)
- art (subject category)
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