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Deviations from Vegard's rule in Al1-xInxN (0001) alloy thin films grown by magnetron sputter epitaxy
- Seppanen, T. (author)
-
- Hultman, Lars (author)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
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- Birch, Jens (author)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
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- (creator_code:org_t)
- AIP Publishing, 2007
- 2007
- English.
- In: Journal of Applied Physics. - : AIP Publishing. - 0021-8979 .- 1089-7550. ; 101:4
- Journal article (peer-reviewed)
Abstract
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- Al1-xInxN (0001) thin films of the pseudobinary AlN-InN system were grown epitaxially onto (111)-oriented MgO wafers with seed layers of Ti1-y Zry N by dual direct current magnetron sputtering under ultrahigh vacuum conditions. The relaxed film c -axis lattice parameters determined by x-ray diffraction were studied as a function of composition in the range of 0.07
Keyword
- TECHNOLOGY
- TEKNIKVETENSKAP
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- ref (subject category)
- art (subject category)
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- Seppanen, T.
- Hultman, Lars
- Birch, Jens
- Beckers, M.
- Kreissig, U.
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- Linköping University
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