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  • Belmonte, J.C.Electronic Materials and Engineering, Electronics Department, Faculty of Physics, University of Barcelona, C/Martí i Franquès 1, E-08028 Barcelona, Spain, Imperial College of London, Department of Materials, Dr. Molly M. Stevens Lab., Exhibition Road, London SW7 2AZ, United Kingdom, Department of Materials, Imperial College, London (author)

Micromachined twin gas sensor for CO and O2 quantification based on catalytically modified nano-SnO2

  • Article/chapterEnglish2006

Publisher, publication year, extent ...

  • Elsevier BV,2006
  • printrdacarrier

Numbers

  • LIBRIS-ID:oai:DiVA.org:liu-50235
  • https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-50235URI
  • https://doi.org/10.1016/j.snb.2005.08.007DOI

Supplementary language notes

  • Language:English
  • Summary in:English

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  • Subject category:ref swepub-contenttype
  • Subject category:art swepub-publicationtype

Notes

  • In this work we present a micromachined twin sensor that can distinguish between carbon monoxide (CO) and O2 gas taking advantage of the high sensitivity of SnO2 to these gases. The SnO2 nanoparticles of both sensors are catalytically modified with different Pd loadings that act as active filters. In this way, one sensor response is turned to present a higher sensitivity to CO than to O2, whereas the other sensor is mainly turned for detecting O2 variations. The twin sensor has two membranes in the same die of micromachined silicon. Each membrane works independently from the other without any cross talk of temperature. The resistance data obtained from this twin sensor as a function of CO and O 2 concentrations is parametrized. Then, two functions are calculated for the quantification of CO/O2 gas mixtures. A comparison with commercial gas sensors is shown. © 2005 Elsevier B.V. All rights reserved.

Subject headings and genre

  • CO
  • Gas sensor
  • Micromachined
  • O2
  • Pd
  • SnO2
  • TECHNOLOGY
  • TEKNIKVETENSKAP

Added entries (persons, corporate bodies, meetings, titles ...)

  • Manzano, J.Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska högskolan (author)
  • Arbiol, J.Electronic Materials and Engineering, Electronics Department, Faculty of Physics, University of Barcelona, C/Martí i Franquès 1, E-08028 Barcelona, Spain (author)
  • Cirera, A.Electronic Materials and Engineering, Electronics Department, Faculty of Physics, University of Barcelona, C/Martí i Franquès 1, E-08028 Barcelona, Spain (author)
  • Puigcorbe, J.Puigcorbé, J., Electronic Materials and Engineering, Electronics Department, Faculty of Physics, University of Barcelona, C/Martí i Franquès 1, E-08028 Barcelona, Spain (author)
  • Vila, A.Vilà, A., Electronic Materials and Engineering, Electronics Department, Faculty of Physics, University of Barcelona, C/Martí i Franquès 1, E-08028 Barcelona, Spain, University of Barcelona (author)
  • Sabate, N.Sabaté, N., Department of Silicon Technologies and Microsystems, National Center of Microelectronics, Campus UAB, E-08193 Bellaterra, Spain, Micro Materials Center, IZM Fraunhofer, Berlin (author)
  • Gracia, I.Gràcia, I., Department of Silicon Technologies and Microsystems, National Center of Microelectronics, Campus UAB, E-08193 Bellaterra, Spain (author)
  • Cane, C.Cané, C., Department of Silicon Technologies and Microsystems, National Center of Microelectronics, Campus UAB, E-08193 Bellaterra, Spain, National Microelectronics Centre, Spain CNM-CSIC (author)
  • Morante, J.R.Electronic Materials and Engineering, Electronics Department, Faculty of Physics, University of Barcelona, C/Martí i Franquès 1, E-08028 Barcelona, Spain, Electronic Materials and Engineering Group, EME, EME (Electronic Materials and Engineering) Research Group, CEMIC (Centre for Engineering of Microsystems), CeRMAE (Centre of Reference of Advanced Materials for Energy) (author)
  • Electronic Materials and Engineering, Electronics Department, Faculty of Physics, University of Barcelona, C/Martí i Franquès 1, E-08028 Barcelona, Spain, Imperial College of London, Department of Materials, Dr. Molly M. Stevens Lab., Exhibition Road, London SW7 2AZ, United Kingdom, Department of Materials, Imperial College, LondonInstitutionen för fysik, kemi och biologi (creator_code:org_t)

Related titles

  • In:Sensors and actuators. B, Chemical: Elsevier BV114:2, s. 881-8920925-40051873-3077

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By the author/editor
Belmonte, J.C.
Manzano, J.
Arbiol, J.
Cirera, A.
Puigcorbe, J.
Vila, A.
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Sabate, N.
Gracia, I.
Cane, C.
Morante, J.R.
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Sensors and actu ...
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Linköping University

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Belmonte, J.C.
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