New materials for chemical and biosensors

• Wide band gap materials such as SiC, AlN, GaN, ZnO, and diamond have excellent properties such as high operation temperature when used as field effect devices and a high resonating frequency of the substrate materials used in piezoelectric resonator devices. Integration of FET and resonating sensors on the same chip enables powerful miniaturized devices, which can deliver increased information about a gas mixture or complex liquid. Examples of sensor devices based on different wide band gap materials will be given.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Kemiteknik -- Kemiska processer (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Chemical Engineering -- Chemical Process Engineering (hsv//eng)

NATURVETENSKAP  -- Kemi -- Materialkemi (hsv//swe)

NATURAL SCIENCES  -- Chemical Sciences -- Materials Chemistry (hsv//eng)

Keyword

AlN

Biosensors

Catalytic metals

Chemical sensors

Diamond

FET

GaN

High frequency

High temperature

Resonators

SAW

SiC

Thin film

Wide band gap materials

ZnO

TECHNOLOGY

TEKNIKVETENSKAP

Catalysis

Materials chemistry

Bioenergiteknik

Publication and Content Type

ref (subject category)

art (subject category)