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Multi-Level Pseudo-Random Signal Design and 'Model-on-Demand' Estimation Applied to Nonlinear Identification of a RTP Wafer Reactor
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- Braun, M.W. (author)
- Linköpings universitet,Reglerteknik,Tekniska högskolan
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- Rivera, D.E. (author)
- Linköpings universitet,Reglerteknik,Tekniska högskolan
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- Stenman, Anders (author)
- Linköpings universitet,Reglerteknik,Tekniska högskolan
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- Linköping : Linköping University Electronic Press, 1999
- English 5 s.
- Series: LiTH-ISY-R, 1400-3902 ; 2156
- In: Preceedings of the 1999 American Control Conference. - Linköping : Linköping University Electronic Press. - 0780349903 ; , s. 1573-1579 vol.3
- Reports (other academic/artistic)
Abstract
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- Guidelines are presented for specifying the design parameters of multi-level pseudo-random sequences in a manner useful for “plant-friendly” nonlinear system identification. These multi-level signals are introduced into a rapid thermal processing wafer reactor simulation and compared against a well-designed pseudo-random binary sequence (PRBS). The resulting data serves as a database for a “model on demand” (MoD) predictor. MoD estimation is attractive because it requires less engineering effort to model a nonlinear plant, compared to global nonlinear models such as neural networks. The improved fit of multi-level signals over the PRBS signal, as well as the usefulness of the MoD estimator, is demonstrated on validation data.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Reglerteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Control Engineering (hsv//eng)
Keyword
- Identification
- Local polynomial modeling
- Nonlinear systems
- Closed loop systems
- Automatic control
- Reglerteknik
- TECHNOLOGY
Publication and Content Type
- vet (subject category)
- rap (subject category)
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- Braun, M.W.
- Rivera, D.E.
- Stenman, Anders
- Foslien, W.
- Hrenya, C.
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