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- Braun, M.W.Linköpings universitet,Reglerteknik,Tekniska högskolan (author)
Multi-Level Pseudo-Random Signal Design and 'Model-on-Demand' Estimation Applied to Nonlinear Identification of a RTP Wafer Reactor
- BookEnglish1999
Publisher, publication year, extent ...
- Linköping :Linköping University Electronic Press,1999
- 5 s.
- electronicrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:liu-55350
- https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-55350URI
- https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-94082URI
- https://doi.org/10.1109/ACC.1999.786090DOI
Supplementary language notes
- Language:English
- Summary in:English
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- SwePubSwePub
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Series
- LiTH-ISY-R,1400-3902 ;2156
Notes
- Guidelines are presented for specifying the design parameters of multi-level pseudo-random sequences in a manner useful for “plant-friendly” nonlinear system identification. These multi-level signals are introduced into a rapid thermal processing wafer reactor simulation and compared against a well-designed pseudo-random binary sequence (PRBS). The resulting data serves as a database for a “model on demand” (MoD) predictor. MoD estimation is attractive because it requires less engineering effort to model a nonlinear plant, compared to global nonlinear models such as neural networks. The improved fit of multi-level signals over the PRBS signal, as well as the usefulness of the MoD estimator, is demonstrated on validation data.
Subject headings and genre
- TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik Reglerteknik hsv//swe
- ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering Control Engineering hsv//eng
- Identification
- Local polynomial modeling
- Nonlinear systems
- Closed loop systems
- Automatic control
- Reglerteknik
- TECHNOLOGY
Added entries (persons, corporate bodies, meetings, titles ...)
- Rivera, D.E.Linköpings universitet,Reglerteknik,Tekniska högskolan (author)
- Stenman, AndersLinköpings universitet,Reglerteknik,Tekniska högskolan (author)
- Foslien, W.Linköpings universitet,Reglerteknik,Tekniska högskolan (author)
- Hrenya, C.Linköpings universitet,Reglerteknik,Tekniska högskolan (author)
- Linköpings universitetReglerteknik (creator_code:org_t)
Related titles
- In:Preceedings of the 1999 American Control ConferenceLinköping : Linköping University Electronic Press, s. 1573-1579 vol.30780349903
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