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High growth rate epitaxy of 4H-SiC layers with improved crystal quality
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- Syväjärvi, Mikael (author)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
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- Yakimova, Rositsa (author)
- Linköpings universitet,Halvledarmaterial,Tekniska högskolan
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- Jacobsson, Henrik (author)
- Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska högskolan
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- 2000
- 2000
- English.
- In: <em>Proc. III Intern. Seminar on SiC and Related Materials</em>. ; , s. 83-88
- Conference paper (peer-reviewed)
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- NATURAL SCIENCES
- NATURVETENSKAP
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- kon (subject category)
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