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Structural and Mechanical Properties of CNx and CPx Thin Solid Films

Broitman, Esteban (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
Furlan, Andrej (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
Geuorguiev, G. K. (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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Czigany, Zsolt (author)
Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska högskolan
Högberg, Hans (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
Hultman, Lars (author)
Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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 (creator_code:org_t)
Trans Tech Publications, 2012
2012
English.
In: Key Engineering Materials. - : Trans Tech Publications. - 1013-9826 .- 1662-9795. ; 488-489, s. 581-584
  • Journal article (peer-reviewed)
Abstract Subject headings
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  • The inherent resiliency, hardness and relatively low friction coefficient of the fullerene-like (FL) allotrope of carbon nitride (CNx) thin solid films give them potential in numerous tribological applications. In this work, we study the substitution of N with P to grow FL-CPx to achieve better cross- and inter-linking of the graphene planes, improving thus the materials mechanical and tribological properties. The CNx and CPx films have been synthesized by DC magnetron sputtering. HRTEM have shown the CPx films exhibit a short range ordered structure with FL characteristics for substrate temperature of 300 degrees C and for a phosphorus content of 10-15 at.%. These films show better mechanical properties in terms of hardness and resiliency compared to those of the FL-CNx films. The low water adsorption of the films is correlated to the theoretical prediction for low density of dangling bonds in both, CNx and CPx. First-principles calculations based on Density Functional Theory (DFT) were performed to provide additional insight on the structure and bonding in CNx, CPx and a-C compounds.

Keyword

carbon nitride; phosphorous-carbide; fullerene-like coatings; thin films; magnetron sputtering
TECHNOLOGY
TEKNIKVETENSKAP

Publication and Content Type

ref (subject category)
art (subject category)

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