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Comparison of Globa...
Comparison of Global Nonlinear Models and "Model-on-Demand" Estimation Applied to Identification of a RTP Wafer Reactor
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- Stenman, Anders (author)
- Linköpings universitet,Reglerteknik,Tekniska högskolan
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- Braun, Martin W. (author)
- Arizona State University, AZ, USA
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- Rivera, Daniel E. (author)
- Arizona State University, AZ, USA
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- Foslien, W. (author)
- Honeywell Technology Center, MN, USA
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(creator_code:org_t)
- Linköping : Linköping University Electronic Press, 1999
- 1999
- English.
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Series: LiTH-ISY-R, 1400-3902 ; 2184
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In: Preceedings of the 38th IEEE Conference on Decision and Control. - Linköping : Linköping University Electronic Press. - 0780352505 ; , s. 3950-3955 vol.4
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Abstract
Subject headings
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- "Model on Demand" (MoD) simulation of the temperature dynamics in a simulated Rapid Thermal Process-ing (RTP) reactor is compared against various types of global models (ARX, semiphysical, combined semiphysical with neural net). The identication data is generated from a m-level pseudo-random sequence input whose parameters are specied systematically using a priori information readily available to the engineer. The MoD estimator outperforms the ARX model and two semi-physical models, while matching the performance of a combined semi-physical with neural net model. This makes MoD estimation an appealing alternative to global methods because of its reduced engineering eort and simplified a priori knowledge regarding model structure.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Reglerteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Control Engineering (hsv//eng)
Keyword
- Identification
- Non-parametric estimation
- TECHNOLOGY
- TEKNIKVETENSKAP
- Automatic control
Publication and Content Type
- ref (subject category)
- kon (subject category)
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