Comparison of Global Nonlinear Models and "Model-on-Demand" Estimation Applied to Identification of a RTP Wafer Reactor

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Fältnamn	Indikatorer	Metadata
000		02985naa a2200445 4500
001		oai:DiVA.org:liu-91182
003		SwePub
008		130417s1999 \| \|\|\|\|\|\|\|\|\|\|\|000 \|\|eng\|
009		oai:DiVA.org:liu-55353
024	7	a https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-911822 URI
024	7	a https://doi.org/10.1109/CDC.1999.8279762 DOI
024	7	a https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-553532 URI
040		a (SwePub)liu
041		a engb eng
042		9 SwePub
072	7	a ref2 swepub-contenttype
072	7	a kon2 swepub-publicationtype
100	1	a Stenman, Andersu Linköpings universitet,Reglerteknik,Tekniska högskolan4 aut
245	1 0	a Comparison of Global Nonlinear Models and "Model-on-Demand" Estimation Applied to Identification of a RTP Wafer Reactor
264	1	a Linköping :b Linköping University Electronic Press,c 1999
338		a print2 rdacarrier
490	0	a LiTH-ISY-R,x 1400-3902 ;v 2184
520		a "Model on Demand" (MoD) simulation of the temperature dynamics in a simulated Rapid Thermal Process-ing (RTP) reactor is compared against various types of global models (ARX, semiphysical, combined semiphysical with neural net). The identication data is generated from a m-level pseudo-random sequence input whose parameters are specied systematically using a priori information readily available to the engineer. The MoD estimator outperforms the ARX model and two semi-physical models, while matching the performance of a combined semi-physical with neural net model. This makes MoD estimation an appealing alternative to global methods because of its reduced engineering eort and simplified a priori knowledge regarding model structure.
650	7	a TEKNIK OCH TEKNOLOGIERx Elektroteknik och elektronikx Reglerteknik0 (SwePub)202022 hsv//swe
650	7	a ENGINEERING AND TECHNOLOGYx Electrical Engineering, Electronic Engineering, Information Engineeringx Control Engineering0 (SwePub)202022 hsv//eng
653		a Identification
653		a Non-parametric estimation
653		a TECHNOLOGY
653		a TEKNIKVETENSKAP
653		a Automatic control
700	1	a Braun, Martin W.u Arizona State University, AZ, USA4 aut
700	1	a Rivera, Daniel E.u Arizona State University, AZ, USA4 aut
700	1	a Foslien, W.u Honeywell Technology Center, MN, USA4 aut
710	2	a Linköpings universitetb Reglerteknik4 org
773	0	t Preceedings of the 38th IEEE Conference on Decision and Controld Linköping : Linköping University Electronic Pressg , s. 3950-3955 vol.4q <3950-3955 vol.4z 0780352505
856	4	u http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-55353y Related report
856	4	u https://liu.diva-portal.org/smash/get/diva2:316031/FULLTEXT01.pdfx primaryx Raw objecty fulltext
856	4 8	u https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-91182
856	4 8	u https://doi.org/10.1109/CDC.1999.827976
856	4 8	u https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-55353

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By the author/editor: Stenman, Anders; Braun, Martin W.; Rivera, Daniel E ...; Foslien, W.

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ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Electrical Engin ...; and Control Engineer ...

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By the university: Linköping University

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