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- Vomiero, AlbertoINFN Laboratori Nazionali di Legnaro (author)
Application of ion beam analysis to the selective sublimation processing of thin films for gas sensing
- Article/chapterEnglish2006
Publisher, publication year, extent ...
- Elsevier BV,2006
- printrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:ltu-4872
- https://urn.kb.se/resolve?urn=urn:nbn:se:ltu:diva-4872URI
- https://doi.org/10.1016/j.nimb.2006.04.016DOI
Supplementary language notes
- Language:English
- Summary in:English
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- SwePubSwePub
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Notes
- Upprättat; 2006; 20141216 (albvom)
- Ion beam analysis was successfully applied to a novel technique, named selective sublimation process (SSP), for deposition of nanostructured gas-sensing films through reactive sputtering. The method consists of the co-deposition of a mixed oxide, one of which has a relatively low sublimation temperature. Annealing at suitable temperature causes the sublimation of the most volatile compound, leaving a layer with adjustable composition. The appropriate choice of thermal treatments and the consequent tailoring of the composition play a crucial role in the determination of the microstructural properties. We developed a model based on diffusion equations that provides a useful guide to control the deposition and processing parameters and we applied the model on the systems TiO2-WO3 and TiO2-MoO3. Rutherford backscattering (RBS) was demonstrated to be effective for the characterization of the diffusion and sublimation processes during SSP. Experimental results fully agree with theoretical prediction, and allowed the calculation of all the parameters involved in SSP. © 2006 Elsevier B.V. All rights reserved.
Subject headings and genre
- NATURVETENSKAP Fysik Annan fysik hsv//swe
- NATURAL SCIENCES Physical Sciences Other Physics Topics hsv//eng
- Depth profiling
- Diffusion
- Selective sublimation process
- Experimentell fysik
- Experimental Physics
Added entries (persons, corporate bodies, meetings, titles ...)
- Scian, C.INFN Laboratori Nazionali di Legnaro (author)
- Della Mea, G.INFN Laboratori Nazionali di Legnaro (author)
- Guidi, V.Dipartimento di Fisica Sperimentale, Università di Torino (author)
- Martinelli, G.Dipartimento di Fisica Sperimentale, Università di Torino (author)
- Schiffrer, G.Dipartimento di Fisica Sperimentale, Università di Torino (author)
- Comini, E.CNR IDASC SENSOR Lab (author)
- Ferroni, M.CNR IDASC SENSOR Lab (author)
- Sberveglieri, G.CNR IDASC SENSOR Lab (author)
- INFN Laboratori Nazionali di LegnaroDipartimento di Fisica Sperimentale, Università di Torino (creator_code:org_t)
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- In:Nuclear Instruments and Methods in Physics Research Section B: Elsevier BV249:1-2 SPEC. ISS., s. 302-3050168-583X1872-9584
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