Fabrication of an integrated Delta E-E-silicon detector by wafer bonding using cobalt disilicide

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Keyword

integrated DE-E detctor Wafer bonding

Electrical engineering, electronics and photonics

Elektroteknik, elektronik och fotonik

Publication and Content Type

ref (subject category)

art (subject category)