Gridded Duo-lateral Position Sensitivity Detector with High Linearity to Low Energetic Electrons in Vacuum Environment

Esebamen, Omeime Xerviar (author): Mittuniversitetet,Avdelningen för elektronikkonstruktion

Thungström, Göran (author): Mittuniversitetet,Avdelningen för elektronikkonstruktion

Nilsson, Hans-Erik (author): Mittuniversitetet,Avdelningen för elektronikkonstruktion

Lundgren, Anders (author): SiTek Electro Optics AB, Ögärdesvägen 13A, SE-433 30 Partille, Sweden

(creator_code:org_t)

2014-12
2014
English.
In: IET Optoelectronics. - : Institution of Engineering and Technology (IET). - 1751-8768 .- 1751-8776. ; 8:6, s. 217-225

Related links:: https://urn.kb.se/re...; show more...; https://doi.org/10.1...; show less...

Abstract Subject headings

Characterizing a position sensitive detector in a vacuum environment without beam position monitoring devices can bechallenging and expensive. With this in mind, we have designed and fabricated a duo-lateral position sensitive detector (PSD) incorporatedwith simple and inexpensive surface features. It was evaluated using scanning electron microscopy. To assist in pinpointing precise positioningas well as acting as path guide during the sweeping of electrons, multiple grids were lithographically patterned on the top layer of the duolateralPSD. By sweeping electrons along two axes of the detector, the position detection error of both axes was determined from the signalsrecorded using a transimpedance amplification circuit. We were able to characterize the linearity over the x- and y-axis of the PSD and theresults show a very high linearity over two-dimensions of the PSD’s active area and that accurate beam monitoring for spectroscopic measurement without additional beam position monitoring devices is possible.

TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

By the author/editor: Esebamen, Omeime ...; Thungström, Göra ...; Nilsson, Hans-Er ...; Lundgren, Anders

About the subject

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