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Surface modificatio...
Surface modification of SU-8 for metal/SU-8 adhesion using RF plasma treatment for application in thermopile detectors
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- Ashraf, Shakeel, 1984- (author)
- Mittuniversitetet,Avdelningen för elektronikkonstruktion,Detector and Photonics,Mid Sweden Univ, Dept Elect Design, Sundsvall, Sweden.
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- Mattsson, Claes (author)
- Mittuniversitetet,Avdelningen för elektronikkonstruktion,Detector and Photonics,Mid Sweden Univ, Dept Elect Design, Sundsvall, Sweden.
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- Fondell, Mattis (author)
- Helmholtz Zentrum, Inst Methods & Instrumentat Synchrotron Radiat Re, Berlin, Germany.
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- Lindblad, Andreas (author)
- Uppsala universitet,Molekyl- och kondenserade materiens fysik
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- Thungström, Göran (author)
- Mittuniversitetet,Avdelningen för elektronikkonstruktion,Detector and Photonics,Mid Sweden Univ, Dept Elect Design, Sundsvall, Sweden.
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(creator_code:org_t)
- 2015-08-19
- 2015
- English.
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In: Materials Research Express. - : Institute of Physics (IOP). - 2053-1591. ; 2:8
- Related links:
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http://iopscience.io...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Subject headings
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- This article reports on plasma treatment of SU-8 epoxy in order to enhance adhesive strength for metals. Its samples were fabricated on standard silicon wafers and treated with (O2 & Ar) RF plasma at a power of 25W at a low pressure of (3×10-3 torr) for different time spans (10 sec – 70 sec). The sample surfaces were characterized in terms of contact angle, surface (roughness and chemistry) and using a tape test. During the contact angle measurement, it was observed that the contact angle was reduced from 73° to 5° (almost wet) and 23° for (O2 & Ar) treated samples, respectively. The RMS surface roughness was significantly increased by 21.5% and 37.2% for (O2 & Ar) treatment, respectively. A pattern of metal squares was formed on the samples using photolithography for a tape test. An adhesive tape was applied to the samples and peeled off at 180o. The maximum adhesion results, more than 90%, were achieved for the O2-treated samples, whereas the Ar-treated samples showed no change. The XPS study shows the formation of new species in the O2-treated sample compared to the Ar-treated samples. The high adhesive results were due to the formation of hydrophilic groups and new O2 species in the O2-treated samples, which were absent in Ar-treated samples.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Annan materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Other Materials Engineering (hsv//eng)
- NATURVETENSKAP -- Fysik -- Fusion, plasma och rymdfysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Fusion, Plasma and Space Physics (hsv//eng)
Keyword
- SU-8
- contact angle
- plasma treatment
- surface modification
- adhesion
- tape test
- theromocouples
Publication and Content Type
- ref (subject category)
- art (subject category)
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