Search: onr:"swepub:oai:DiVA.org:miun-3540" >
Processing and char...
Processing and characterization of a position sensitive lateral-effect metal oxide semiconductor detector
-
- Andersson, Henrik (author)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)
-
- Thungström, Göran (author)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)
-
Lundgren, A. (author)
-
show more...
-
- Nilsson, Hans-Erik (author)
- Mittuniversitetet,Institutionen för informationsteknologi och medier (-2013)
-
show less...
-
(creator_code:org_t)
- ELSEVIER SCIENCE BV, 2004
- 2004
- English.
-
In: Nuclear Instruments and Methods in Physics Research Section A. - : ELSEVIER SCIENCE BV. - 0168-9002 .- 1872-9576. ; 531:1-2, s. 140-146
- Related links:
-
https://urn.kb.se/re...
-
show more...
-
https://doi.org/10.1...
-
show less...
Abstract
Subject headings
Close
- Position sensingdetectors (PSDs) are useful in many applications, such as vibration, displacement, and triangulation measurements. In this paper we present a lateral-effect metal oxide semiconductor PSD with switchingcapability fabricated by our group. The detector can be switched off by the application of 0V on the substrate and 0.2V on the gate. A linear current-position behaviour is exhibited by the detector at a substrate bias of both 5 and 10V with the gate at 0V. There is no effect on the linearity when the substrate voltage is changed from 5 to 10V. The non-linearity is within 0.2% at a distance of 71.5mm from origin for 5, 10 and 15mm device length.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- MOS ITO PSD position sensitive detector anti reflective coating
- Electrical engineering, electronics and photonics
- Elektroteknik, elektronik och fotonik
Publication and Content Type
- ref (subject category)
- art (subject category)
Find in a library
To the university's database