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Carbon dioxide abso...
Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguide
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- Ottonello Briano, Floria (författare)
- KTH,Mikro- och nanosystemteknik
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- Errando-Herranz, Carlos, 1989- (författare)
- KTH,Mikro- och nanosystemteknik
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Rödjegård, Henrik, 1974- (författare)
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Martin, H. (författare)
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- Sohlström, Hans, 1952- (författare)
- KTH,Mikro- och nanosystemteknik
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- Gylfason, Kristinn, 1978- (författare)
- KTH,Mikro- och nanosystemteknik
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(creator_code:org_t)
- OSA - The Optical Society, 2020
- 2020
- Engelska.
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Ingår i: Optics Letters. - : OSA - The Optical Society. - 0146-9592 .- 1539-4794. ; 45:1, s. 109-112
- Relaterad länk:
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https://doi.org/10.1...
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http://ol.osa.org/ab...
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https://kth.diva-por... (primary) (Raw object)
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- Carbon dioxide (CO2) is a gas vital for life on Earth. It is also a waste product of human activities and is widely used in agriculture and industry. Its accurate sensing is therefore of great interest. Optical sensors exploiting the mid-infrared light absorption of CO2 provide high selectivity, but their large size and high cost limit their use. In this Letter, we demonstrate CO2 gas sensingat 4.2 μm wavelength using an integrated silicon waveguide, featuring a sensitivity to CO2of 44% that of free-space sensing. The suspended waveguide is fabricated on a silicon-on-insulator substrate by a single-lithography-step process, and we route it into a mid-infrared photonic circuit for on-chip-referenced gas measurements. Its demonstrated performance and its simple and scalable fabrication make our waveguide ideal for integration in miniaturized CO2 sensors for distributed environmental monitoring, personal safety, and medical and high-volume consumer applications. © 2019 Optical Society of America.
Ämnesord
- NATURVETENSKAP -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)
Nyckelord
- Absorption spectroscopy
- Carbon dioxide
- Infrared devices
- Light absorption
- Lithography
- Photonic devices
- Silicon on insulator technology
- Silicon photonics
- Carbon dioxide absorption
- Consumer applications
- Environmental Monitoring
- High selectivity
- Photonic circuits
- Photonic waveguides
- Silicon waveguide
- Silicon-on-insulator substrates
- Optical waveguides
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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