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Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial encapsulation layer
- Höchst, A (author)
- Scheuerer, R (author)
- Stahl, H (author)
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- Fischer, F (author)
- Metzger, L (author)
- Reichenbach, R (author)
- Lrmer, F (author)
- Kronmuller, S (author)
- Watcham, S (author)
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- (creator_code:org_t)
- 2004
- 2004
- English.
- In: Sensors and Actuators A-Physical. - 0924-4247 .- 1873-3069. ; 114, s. 355-361
- Journal article (peer-reviewed)
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Subject headings
- NATURVETENSKAP -- Data- och informationsvetenskap (hsv//swe)
- NATURAL SCIENCES -- Computer and Information Sciences (hsv//eng)
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- ref (subject category)
- art (subject category)
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- Höchst, A
- Scheuerer, R
- Stahl, H
- Fischer, F
- Metzger, L
- Reichenbach, R
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- Lrmer, F
- Kronmuller, S
- Watcham, S
- Rusu, C
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- NATURAL SCIENCES
- NATURAL SCIENCES
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