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Printed Glass for Anodic Bonding - A Packaging Concept for MEMS System On a Chip
- Bergstedt, L (author)
-
- Persson, K (author)
- RISE,Acreo
- (creator_code:org_t)
- 2002
- 2002
- English.
- In: Advancing Microelectronics. ; 29:1
- Journal article (peer-reviewed)
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Subject headings
- NATURVETENSKAP -- Data- och informationsvetenskap (hsv//swe)
- NATURAL SCIENCES -- Computer and Information Sciences (hsv//eng)
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- ref (subject category)
- art (subject category)
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