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Tunable Solidly Mou...
Tunable Solidly Mounted Thin Film Bulk Acoustic Resonators Based on BaxSr1-xTiO3 Films
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- Berge, John (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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- Vorobiev, Andrei, 1963 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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Steichen, William (author)
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- Gevorgian, Spartak, 1948 (author)
- Chalmers tekniska högskola,Chalmers University of Technology
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(creator_code:org_t)
- 2007
- 2007
- English.
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In: IEEE Microwave and Wireless Components Letters. - 1531-1309 .- 1558-1764. ; 17:9, s. 655-657
- Related links:
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https://urn.kb.se/re...
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https://research.cha...
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https://doi.org/10.1...
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Abstract
Subject headings
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- Electrically tunable solidly mounted thin film bulk acoustic resonators based on BaxSr1-xTiO3 films are reported for the first time. The films are acoustically isolated from the silicon substrate by a Bragg reflector stack. Applying DC bias induces piezoelectric effect and an acoustic resonance at approximately 4 GHz. Under 10 V applied DC bias the resonance frequency of the resonators based on Ba0.25Sr0.75TiO3 films is tuned 1.2% to lower frequencies. The Q-factor of these resonators is approximately 120, and the electromechanical coupling coefficient is 0.5%. The resonant frequency of the BaTiO3 based resonators shifts upwards 1.3% under 10 V DC bias, and the -factor is approximately 30, with an electromechanical coupling coefficient of 6.2%.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Annan materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Other Materials Engineering (hsv//eng)
Publication and Content Type
- ref (subject category)
- art (subject category)
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