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Improved Properties...
Improved Properties of AlON/4H-SiC Interface for Passivation Studies
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- Wolborski, Maciej (author)
- KTH,Mikroelektronik och tillämpad fysik, MAP
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- Martin, David M. (author)
- Uppsala universitet,Fasta tillståndets elektronik
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- Bakowski, Mietek (author)
- Royal Institute of Technology,Dept. of Microelectronics and Applied Physics
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- Hallén, Anders (author)
- KTH,Mikroelektronik och tillämpad fysik, MAP
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- Katardjiev, Ilia (author)
- Uppsala universitet,Fasta tillståndets elektronik
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(creator_code:org_t)
- Switzerland : Trans Tech Publications, 2009
- 2009
- English.
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In: Materials Science Forum. - Switzerland : Trans Tech Publications. - 0255-5476 .- 1662-9752. ; 600-603, s. 763-766
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.4...
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https://urn.kb.se/re...
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Abstract
Subject headings
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- Aluminium oxynitride (AlON) films of variable composition were grown by reactive sputter deposition in a N2/O2 ambient at room temperature and studied for device passivation. The films were deposited on Si and 4H-SiC substrates as well as on SiC PiN diodes. The AlON/SiO2/SiC stack provided superior interface properties compared to the AlON/SiC structure. Samples with 8% oxygen content, in the AlON film, and subjected to a UV exposure prior to deposition, exhibited the smallest net positive interface charge. A large net negative interface charge was observed for samples with 10% oxygen content and for the samples with 8% oxygen content and subjected to a RCA1 surface clean, prior to deposition. Diodes passivated with AlON films demonstrated reduced leakage current compared to as-processed diodes.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- SiC
- AlN
- passivation
- leakage currents
- Electronics
- Elektronik
- Elektronik
- Electronics
- Electrophysics
Publication and Content Type
- ref (subject category)
- art (subject category)
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