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Direct current magn...
Direct current magnetron sputtering deposition of nanocomposite alumina – zirconia thin films
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- Trinh, David Huy, 1981- (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Kubart, Tomas (author)
- Uppsala universitet,Fasta tillståndets elektronik,Department of Solid State Electronics, The Ångström Laboratory, Uppsala University, Uppsala, Sweden
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- Nyberg, Tomas (author)
- Uppsala universitet,Fasta tillståndets elektronik,Department of Solid State Electronics, The Ångström Laboratory, Uppsala University, Uppsala, Sweden
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- Ottosson, M (author)
- Department of Solid State Electronics, The Ångström Laboratory, Uppsala University, Uppsala, Sweden
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- Hultman, Lars (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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- Högberg, Hans (author)
- Linköpings universitet,Tunnfilmsfysik,Tekniska högskolan
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(creator_code:org_t)
- Elsevier BV, 2008
- 2008
- English.
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In: Thin Solid Films. - : Elsevier BV. - 0040-6090 .- 1879-2731. ; 516:23, s. 8352-8358
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https://doi.org/10.1...
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Abstract
Subject headings
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- Mixed aluminium oxide-zirconium oxide thin solid films have been synthesized at similar to 300 degrees C by reactive direct current magnetron sputtering from two targets. Partial pressure control of the oxygen gas ensured stoichiometric films without compromising the deposition rate. The composition of the films ranged from pure alumina to pure zirconia as measured by X-ray photoelectron spectroscopy. Microstructural characterisation showed that the pure zirconium oxide films nucleated initially as the tetragonal zirconia phase, while the 100/010/001 textured monoclinic zirconia phase grew under steady-state conditions with a columnar structure. Addition of aluminiurn to similar to 3 at.% caused the formation of tetragonal zirconia in the films, while further additions led to an amorphous structure as governed by the alumina under the present kinetic limitations.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- Alumina
- Zirconia
- Dual reactive direct current magnetron sputtering
- Nanocomposite
- X-ray photoelectron spectroscopy
- X-ray diffraction
- Transmission electron microscopy
- Electronics
- Elektronik
- NATURAL SCIENCES
Publication and Content Type
- ref (subject category)
- art (subject category)
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