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- Grenier, K (author)
IC compatible MEMS technologies
- Article/chapterEnglish2005
Publisher, publication year, extent ...
- 2005
- printrdacarrier
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- LIBRIS-ID:oai:DiVA.org:uu-10713
- https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-10713URI
Supplementary language notes
- Language:English
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- SwePubSwePub
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- Mazenq, L (author)
- Duboc, D (author)
- Bouchriha, F (author)
- Cocetti, F (author)
- Öjefors, ErikUppsala universitet,Institutionen för teknikvetenskaper,Signalbehandling,Signals and systems(Swepub:uu)eroje227 (author)
- Lindberg, PeterUppsala universitet,Institutionen för teknikvetenskaper,Signalbehandling,Signals and systems(Swepub:uu)pelin425 (author)
- Rydberg, AndersUppsala universitet,Institutionen för teknikvetenskaper,Signalbehandling,Signals and systems(Swepub:uu)anderydb (author)
- Berntgen, J (author)
- Rabe, WJ (author)
- Sonmez, E (author)
- Abele, Peter (author)
- Schumacher, H (author)
- Plana, R (author)
- Uppsala universitetInstitutionen för teknikvetenskaper (creator_code:org_t)
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- In:35th European Microwave Conference (EuMC)
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