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Role of Si implanta...
Role of Si implantation in control of underlap length in Schottky-barrier source/drain MOSFETs on ultrathin body SOI
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- Qiu, Zhijun (author)
- KTH,Integrerade komponenter och kretsar
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- Zhang, Zuhua (author)
- KTH,Integrerade komponenter och kretsar
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- Olsson, Jörgen, 1966- (author)
- Uppsala universitet,Fasta tillståndets elektronik
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- Lu, J. (author)
- Uppsala universitet,Fasta tillståndets elektronik
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- Hellström, Per Erik (author)
- KTH,Integrerade komponenter och kretsar
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Liu, R. (author)
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- Östling, Mikael (author)
- KTH,Integrerade komponenter och kretsar
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- Zhang, ShiLin (author)
- KTH,Integrerade komponenter och kretsar
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(creator_code:org_t)
- NEW YORK : IEEE, 2008
- 2008
- English.
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In: Proceedings of ULIS. - NEW YORK : IEEE. ; , s. 175-178, s. 175-178
- Related links:
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https://urn.kb.se/re...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- This works demonstrates a novel approach using Si implantation prior to Pt deposition and PtSi formation to control the underlap length between the PtSi source/drain regions to the gate in Schottky-Barrier (SB-) MOSFETs. Dopant segregation at the PtSi/Si interface is used to enhance device performance. With the lon /Ioff current ratio as an indicator, optimized Si implant doses are found for both n- and p-channel SB-MOSFETs. Through an effective barrier width, the underlap length has direct implication on the leakage current.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Keyword
- MOSFET
- Schottky barriers
- ion implantation
- silicon-on-insulator
- PtSi-Si
- Schottky barrier source/drain MOSFET
- dopant segregation
- leakage current
- metal-oxide-semiconductor field effect transistor
- silicon implantation
- silicon on insulator
- ultrathin body SOI
- underlap length
- PtSi
- Si implantation
- dopant segregation
- schottky barrier-MOSFET
- underlap length
- Physics
- Fysik
Publication and Content Type
- ref (subject category)
- kon (subject category)
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