Real time characterization of hydrogenation mechanism of palladium thin films by in situ spectroscopic ellipsometry

• The hydrogenation mechanism of Pd thin films was analyzed in real time by measuring the variation in ellipsometric Psi and Delta using in situ spectroscopic ellipsometry. In the initial stage, the hydrogenation proceeded from the film surface and a mixture layer of metal and hydride, not a uniform hydride layer, was formed at the surface. With time evolution, the thickness of the mixture layer increased and that of the Pd metal layer decreased rapidly. After the whole Pd metal layer changed to the mixture layer, the concentration of hydride in the mixture layer increased. Finally, the concentration reached one and hydrogenation of Pd was finished.

Keyword

ellipsometry

hydrogenation

metallic thin films

mixtures

palladium

Poisson distribution

Poisson ratio

TECHNOLOGY

TEKNIKVETENSKAP

Publication and Content Type

ref (subject category)

art (subject category)