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Controlled growth o...
Controlled growth of nanocrystalline silicon on permalloy micro-patterns
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Kocka, J. (author)
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Mates, T. (author)
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Ledinsky, M. (author)
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Stuchlik, J. (author)
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Fejfar, A. (author)
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- Gunnarsson, Klas (author)
- Uppsala universitet,Fasta tillståndets fysik
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(creator_code:org_t)
- 2007-06-12
- 2007
- English.
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In: Applied Physics A. - : Springer Science and Business Media LLC. - 0947-8396 .- 1432-0630. ; 88:4, s. 797-800
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- Lithographically prepared micrometer-sized permalloy ellipses were used to control the growth of nanocrystalline Si in otherwise amorphous Si film prepared by plasma enhanced chemical vapor deposition. Atomic force microscopy and micro-Raman spectroscopy were employed to study the surface structures before and after the deposition of the Si film. The possible applications of the controlled growth of nanocrystalline Si micro-patterns are discussed as well as the mechanisms leading to the growth of these patterns.
Subject headings
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
Keyword
- Physics
- Fysik
- TECHNOLOGY
- TEKNIKVETENSKAP
Publication and Content Type
- ref (subject category)
- art (subject category)
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