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  • Yamada, Y. (author)

Estimation of the amount of the proton injected into tungsten oxide thin films during deposition using spectroscopic ellipsometry

  • Article/chapterEnglish2007

Publisher, publication year, extent ...

  • Elsevier BV,2007
  • printrdacarrier

Numbers

  • LIBRIS-ID:oai:DiVA.org:uu-14850
  • https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-14850URI
  • https://doi.org/10.1016/j.tsf.2006.10.010DOI

Supplementary language notes

  • Language:English
  • Summary in:English

Part of subdatabase

Classification

  • Subject category:ref swepub-contenttype
  • Subject category:art swepub-publicationtype

Notes

  • Tungsten oxide thin films injected with protons (HxWO3) during deposition were prepared on glass substrates using reactive direct-current magnetron sputtering in a mixture of argon, oxygen, and hydrogen gases. The as-deposited films were bronze. The amount of injected protons, namely the x-value in HxWO3, was estimated using the dispersion of the extinction coefficient (κ). The dispersion was evaluated by analyzing the experimental spectra measured with spectroscopic ellipsometry and optical photometry using the model composed of a homogeneous tungsten bronze layer with an additional surface roughness layer. As a result of analysis, the x-value was estimated to be approximately 0.1.

Subject headings and genre

  • Tungsten bronzes
  • Ellipsometry
  • Solid-state devices
  • Switchable mirrors
  • TECHNOLOGY
  • TEKNIKVETENSKAP

Added entries (persons, corporate bodies, meetings, titles ...)

  • Kawaji, S. (author)
  • Bao, S. (author)
  • Okada, M. (author)
  • Tazawa, M. (author)
  • Yoshimura, K. (author)
  • Roos, ArneUppsala universitet,Fasta tillståndets fysik(Swepub:uu)arneroos (author)
  • Uppsala universitetFasta tillståndets fysik (creator_code:org_t)

Related titles

  • In:Thin Solid Films: Elsevier BV515:7-8, s. 3825-38290040-60901879-2731

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