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Development of a suspended, robust, thermally insulated micro chamber of thick silicon dioxide for microthrusters and micoreactors
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- Palmer, Kristoffer, 1983- (author)
- Uppsala universitet,Mikrosystemteknik,ÅSTC
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- Lekholm, Ville (author)
- Uppsala universitet,Mikrosystemteknik,ÅSTC
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- Kratz, Henrik (author)
- Uppsala universitet,Mikrosystemteknik,ÅSTC
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- (creator_code:org_t)
- 2011
- 2011
- English.
- In: PowerMEMS 11 Technical digest. - 9788996759102 ; , s. 62-65
- Conference paper (peer-reviewed)
Subject headings
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Subject headings
- TEKNIK OCH TEKNOLOGIER -- Materialteknik -- Annan materialteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Materials Engineering -- Other Materials Engineering (hsv//eng)
Keyword
- TECHNOLOGY
- TEKNIKVETENSKAP
- Engineering Science with specialization in Materials Science
- Teknisk fysik med inriktning mot materialvetenskap
Publication and Content Type
- ref (subject category)
- kon (subject category)
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- Lekholm, Ville
- Kratz, Henrik
- Nguyen, Hugo
- Thornell, Greger
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- ENGINEERING AND TECHNOLOGY
- ENGINEERING AND ...
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- Uppsala University
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