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Experimental invest...
Experimental investigation of the electrical properties of atomic layer deposited hafnium-rich silicate films on n-type silicon
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Dueñas, S. (author)
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Castán, H. (author)
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Garcia, H. (author)
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Bailón, L. (author)
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Kukli, K. (author)
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Ritala, M. (author)
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Leskelä, M. (author)
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- Rooth, Mårten (author)
- Uppsala universitet,Oorganisk kemi
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- Wilhelmsson, Ola (author)
- Uppsala universitet,Oorganisk kemi
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- Hårsta, Anders (author)
- Uppsala universitet,Oorganisk kemi
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(creator_code:org_t)
- AIP Publishing, 2006
- 2006
- English.
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In: Journal of Applied Physics. - : AIP Publishing. - 0021-8979 .- 1089-7550. ; 100:9, s. 094107-
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- This work examines the structural and electrical properties of HfSixOy film based metal-insulator-semiconductor capacitors by means of x-ray diffraction, x-ray photoelectron spectroscopy, capacitance-voltage (C-V), deep level transient spectroscopy, and conductance transient (G-t) techniques. Hafnium-rich silicate films were atomic layer deposited onto HF-etched or SiO2 covered silicon. Although as-deposited samples exhibit high interfacial state and disorder-induced gap state densities, a postdeposition thermal annealing in vacuum under N2 flow for 1 min at temperatures between 600 and 730 °C clearly improves the interface quality. Marked crystallization and phase separation occurred at 800 °C, increasing the structural heterogeneity and defect density in the dielectric oxide layers.
Subject headings
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
Keyword
- Inorganic chemistry
- Oorganisk kemi
Publication and Content Type
- ref (subject category)
- art (subject category)
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- By the author/editor
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Dueñas, S.
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Castán, H.
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Garcia, H.
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Bailón, L.
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Kukli, K.
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Ritala, M.
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show more...
-
Leskelä, M.
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Rooth, Mårten
-
Wilhelmsson, Ola
-
Hårsta, Anders
-
show less...
- About the subject
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- NATURAL SCIENCES
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NATURAL SCIENCES
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and Chemical Science ...
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and Inorganic Chemis ...
- Articles in the publication
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Journal of Appli ...
- By the university
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Uppsala University