Atomic layer deposition of thin film laminates and solid solutions – the case of zinc tin oxide

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Kemiteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Chemical Engineering (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Materialteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Materials Engineering (hsv//eng)

NATURVETENSKAP  -- Fysik -- Den kondenserade materiens fysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Condensed Matter Physics (hsv//eng)

Keyword

atomic layer deposition

thin films

semiconductors

spectroscopic ellipsometry

low energy ion scattering (LEIS)

Publication and Content Type

ref (subject category)

kon (subject category)