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Growth and characte...
Growth and characterization of chromium carbide films deposited by high rate reactive magnetron sputtering for electrical contact applications
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- Nygren, Kristian (author)
- Uppsala universitet,Oorganisk kemi
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- Samuelsson, Mattias (author)
- Impact Coatings AB, Sweden
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- Flink, Axel (author)
- Impact Coatings AB, Sweden
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- Ljungcrantz, Henrik (author)
- Impact Coatings AB, Sweden
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- Kassman Rudolphi, Åsa (author)
- Uppsala universitet,Tillämpad materialvetenskap
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- Jansson, Ulf (author)
- Uppsala universitet,Oorganisk kemi
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(creator_code:org_t)
- Elsevier : Elsevier BV, 2014
- 2014
- English.
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In: Surface & Coatings Technology. - Elsevier : Elsevier BV. - 0257-8972 .- 1879-3347. ; 260, s. 326-334
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Abstract
Subject headings
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- Chromium carbide films with different phase contents were deposited at 126±26 °C by industrial high rate reactivemagnetron sputtering, using both direct current magnetron sputtering (DCMS) and high power impulsemagnetron sputtering (HiPIMS). Film structure and properties were studied by SEM, XRD, TEM, XPS, NRA, Raman spectroscopy, nanoindentation, unlubricated reciprocating sliding experiments, and a laboratory setup to measure electrical contact resistance. The films consisted of amorphous a-CrCy, a nanocrystalline minority phase of metastable cubic nc-CrCx, and a hydrogenated graphite-like amorphous carbon matrix (a-C:H). The DCMS and HiPIMS processes yielded films with similar phase contents and microstructures, as well as similar functional properties. Low elastic modulus, down to 66 GPa, indicated good wear properties via a hardness/elastic modulus (H/E) ratio of 0.087. Unlubricated steady-state friction coefficients down to 0.13 were obtained for films with 69 at.% carbon, while the electrical contact resistance could be reduced by two orders of magnitude by addition of a-C:H phase to purely carbidic films. The present films are promising candidates for sliding electrical contact applications.
Subject headings
- NATURVETENSKAP -- Kemi -- Fysikalisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Physical Chemistry (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Keyword
- Direct current magnetron sputtering
- High power impulse magnetron sputtering
- Reactive sputtering
- Amorphous chromium carbide
- Solid lubricant
- Contact resistance
Publication and Content Type
- ref (subject category)
- art (subject category)
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