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Hafnium oxide in high-temperature microelectromechanical systems
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- Lekholm, Ville, 1976- (author)
- Uppsala universitet,Ångström Space Technology Centre (ÅSTC)
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- Klintberg, Lena (author)
- Uppsala universitet,Mikrosystemteknik
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- Persson, Anders (author)
- Uppsala universitet,Mikrosystemteknik
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- English.
- Other publication (other academic/artistic)
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- TEKNIK OCH TEKNOLOGIER -- Annan teknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Other Engineering and Technologies (hsv//eng)
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- ovr (subject category)
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- ENGINEERING AND TECHNOLOGY
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- Uppsala University
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