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Oxygen content and depth profiling in silicon surface technology studied by the 16 0(aa)160 resonance at 3.015 MeV
- Possnert, Göran (author)
- Fahlander, C (author)
- Orre, B (author)
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- Norde, Herman (author)
- Petersson, CS (author)
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- (creator_code:org_t)
- 1978
- 1978
- English.
- In: Physica Scripta. - 0031-8949 .- 1402-4896. ; 18, s. 410-
- Journal article (peer-reviewed)
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- art (subject category)
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- Possnert, Göran
- Fahlander, C
- Orre, B
- Norde, Herman
- Petersson, CS
- Tove, PA
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- Physica Scripta
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- Uppsala University
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