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Electrical characteristics of sputtering - induced defects in n-type silicon

Andersson, LP (author)
Uppsala universitet,Fasta tillståndets elektronik
Evwaraye, AO (author)
 (creator_code:org_t)
1977
1977
English.
In: Vacuum. - 0042-207X .- 1879-2715. ; 28:1
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